WSU1 (Picosun R-75 BE ALD Reactor)
 

  • 1 solid state booster, 2 bubbler sources, 1 external gas source
     
  • Touchscreen display

  • Ozone generator

  • Adixen 2033 C2 oil pump

  • Jun-Air 2000-25M compressor / GeniSys nitrogen purifier for 99.999% N2

              

Picosun R-75 BE ALD Reactor                 

Electronics Cabinet                 

                   

                  

               
 

 Internal Reaction Chamber

Loading Platform



 

Mark Saly loading a silicon wafer in WSU1    





 

 WSU2 (Picosun R-75 BE ALD Reactor)
 

  • 1 solid state booster, 2 bubbler sources, 1 external gas source
     
  • Touchscreen display

  • Load Lock for air-sensitive materials

  • Ebara ESA25-D dry pump

  • Picosun particle trap

  • Jun-Air 2000-25M compressor / GeniSys nitrogen purifier for 99.999% N2

 

 

Picosun R-75 BE ALD Reactor with Load Lock


Tom Knisley growing copper films on WSU2

          

            Ebara ESA25-D Dry Pump

              Picosun Particle Trap

                              

                                                                                                                                 




WSU3 (Picosun R-200 BE ALD Reactor)
 

  • 2 solid state boosters, 2 bubbler sources, 1 external gas source
     
  • Touchscreen display

  • Powder coater

  • Ebara ESA25-D dry pump

  • Picosun particle trap

  • House nitrogen + SAES in-line purifier for for 99.99999% N2
  

          

 

 

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